خلاصه کتاب و اطلاعات بیشتر
MEMS products have developed over the last 20 years to become highly cost competitive rather than simply novel. While cost analysis for semiconductor design and manufacture is well established, it is less so for MEMS.This volume seeks to show how cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale foundries.The content examines the processes and equipment sufficiently for the reader to appreciate how costs arise. Appropriate publications are referenced so that such technical details may be examined in detail, outside the confines of cost analysis. Representative costs are examined in sufficient detail and accuracy for specific equipment, processes, products, or foundries to show how financial models can be introduced to estimate the cost and price for a MEMS product.