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  • Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

    L F Thompson C G Willson M J Bowden American Chemical Society. Division of Organic Coatings and Plastics Chemistry. American Chemical Society. Meeting (eds.)

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8 - 9Hours to read